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Proceedings Paper

A deflectometric sensor for the on-machine surface form measurement and adaptive manufacturing
Author(s): Stefan Krey; Iris Erichsen; Ilka Mahns; Wim D. van Amstel; Karl Vielhaber
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Paper Abstract

Aspherical lenses are usually generated by a multi-axis computer numerically controlled machine and axis guidance errors as well as wear and environmental influences lead to unavoidable form deviations. Therefore, the manufacturing process is often performed iteratively with intermitting measurement steps outside of the manufacturing machine and repositioning the sample into the machine, which is causing additional errors. We present a new deflectometric sensor designed for the machine integration, so that the form measurement is done inside of the manufacturing machine and errors due to the sample removal are avoided. The compact and robust sensor is based on the deflectometry principle. It detects the deflection angle of a focused laser beam on the surface under test and measures the local slope angle of the surface in 2D. By scanning the specimen's surface using the machine axes and integration of the slope angles, the topography can be calculated. The angular measurement range of +/-9.5° permits the measurement of highly aspheric surfaces, e.g. at a clear aperture of 8 mm a maximum deviation of more than 500 μm can be measured at a resolution on the nanometer scale.

Paper Details

Date Published: 14 May 2010
PDF: 7 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180C (14 May 2010); doi: 10.1117/12.854643
Show Author Affiliations
Stefan Krey, TRIOPTICS GmbH (Germany)
Iris Erichsen, TRIOPTICS GmbH (Germany)
Ilka Mahns, TRIOPTICS GmbH (Germany)
Wim D. van Amstel, TRIOPTICS GmbH (Germany)
Karl Vielhaber, Fraunhofer-Institut für Produktionstechnologie (Germany)

Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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