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Proceedings Paper

Subwavelength structures for infrared filtering
Author(s): Steffen Kurth; Karla Hiller; Norbert Neumann; Mario Seifert; Martin Ebermann; Joachim Zajadacz; Thomas Gessner
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Paper Abstract

This work deals with the replacement of the reflection layer stacks by sub-wavelength structures, which form the cavity of Fabry-Perot-Interferometer (FPI) infrared filters. Periodically arranged metal ring resonators are investigated regarding reflectivity and sensitivity with respect to polarization angle by Finite Difference Method (FDM) analysis. E-beam lithography is used for the fabrication of arrays of ring resonators made from aluminum on silicon nitride thin film substrate. The wavelength depending reflection coefficient for random polarization and for linear polarization in different directions is measured by Fourier Transform Infrared Spectrometer and compared to the results from theoretical analysis. Fixed wavelength FPI etalons are in the focus of further theoretical and experimental investigations.

Paper Details

Date Published: 13 May 2010
PDF: 11 pages
Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 77131S (13 May 2010); doi: 10.1117/12.854609
Show Author Affiliations
Steffen Kurth, Fraunhofer-Institut für Einrichtung Elektronische Nanosysteme (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)
Norbert Neumann, InfraTec GmbH (Germany)
Mario Seifert, Technische Univ. Chemnitz (Germany)
Martin Ebermann, InfraTec GmbH (Germany)
Joachim Zajadacz, Leibniz-Institut für Oberflächenmodifizierung e.V. (Germany)
Thomas Gessner, Fraunhofer-Institut für Einrichtung Elektronische Nanosysteme (Germany)

Published in SPIE Proceedings Vol. 7713:
Photonic Crystal Materials and Devices IX
Hernán R. Míguez; Sergei G. Romanov; Lucio Claudio Andreani; Christian Seassal, Editor(s)

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