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Proceedings Paper

Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy
Author(s): Jonas Kühn; Eduardo Solanas; Sébastien Bourquin; Jean-François Blaser; Luca Dorigatti; Thierry Keist; Yves Emery; Christian Depeursinge
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Paper Abstract

We present fast high-roughness and non-contact surface measurements by digital holographic microscopy (DHM). By using single- and dual-wavelength operation modes, coupled with advanced image stitching and non-measured points management methods, the technique enables two-dimensional roughness measurements up to the micrometer (N6). The sample is mechanically scanned over a surface up to 5 × 0.3 mm2 with 17 holograms each acquired in less than 500 μs, the corresponding phase images stitched together by software, and therefore providing multiple profiles measurement in the ISO definition in less than 30 s. The approach is validated by inspection of several different roughness standards and our technique is demonstrated to be in agreement with two existing well-known techniques in the field.

Paper Details

Date Published: 14 May 2010
PDF: 8 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 771805 (14 May 2010); doi: 10.1117/12.854550
Show Author Affiliations
Jonas Kühn, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Eduardo Solanas, Lyncée Tec SA (Switzerland)
Sébastien Bourquin, Lyncée Tec SA (Switzerland)
Jean-François Blaser, Trimos SA (Switzerland)
Luca Dorigatti, Trimos SA (Switzerland)
Thierry Keist, Trimos SA (Switzerland)
Yves Emery, Lyncée Tec SA (Switzerland)
Christian Depeursinge, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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