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Proceedings Paper

Active modular microsystems based on Mach-Zehnder interferometers
Author(s): Sven Schuele; Stefan Hengsbach; Uwe Hollenbach; Jingshi Li; Jürg Leuthold; Juergen Mohr
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Paper Abstract

Cost efficient and purpose build microsystems for technical applications become more and more relevant. In the field of optical devices we developed an adaptive modular micro-optical system based on a Mach-Zehnder Delay Interferometer to show the feasibility to fabricate active optical microsystems adaptive to different measurement and data communication network applications. To realize such an adaptive modular micro-optical system with an active tuning device, a construction kit was designed and realized to combine different types of signal routing and system tuning, for example by choosing an optical or electronical signal output and different microactuators suitable for several applications, with special designed micro-optical benches (MOB) including the respective optical structures or hybrid integrated components. It is based on automated passive alignment of the optical components and has to be designed by using well defined interfaces. Different types of this modular system have been set-up and the application as a Fourier transformed wavemeter are shown as an example.

Paper Details

Date Published: 13 May 2010
PDF: 10 pages
Proc. SPIE 7716, Micro-Optics 2010, 771610 (13 May 2010); doi: 10.1117/12.854492
Show Author Affiliations
Sven Schuele, Karlsruhe Institute of Technology (Germany)
Stefan Hengsbach, Karlsruhe Institute of Technology (Germany)
Uwe Hollenbach, Karlsruhe Institute of Technology (Germany)
Jingshi Li, Karlsruhe Institute of Technology (Germany)
Jürg Leuthold, Karlsruhe Institute of Technology (Germany)
Juergen Mohr, Karlsruhe Institute of Technology (Germany)

Published in SPIE Proceedings Vol. 7716:
Micro-Optics 2010
Hugo Thienpont; Peter Van Daele; Jürgen Mohr; Hans Zappe, Editor(s)

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