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Proceedings Paper

An extended Fourier modal method for plane-wave scattering from finite structures
Author(s): Maxim Pisarenco; Joseph Maubach; Irwan Setija; Robert Mattheij
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Paper Abstract

This paper extends the area of application of the Fourier modal method from periodic structures to aperiodic ones, in particular for plane-wave illumination at arbitrary angles. This is achieved by placing perfectly matched layers at the lateral sides of the computational domain and reformulating the governing equations in terms of a contrast field which does not contain the incoming field.

Paper Details

Date Published: 14 May 2010
PDF: 8 pages
Proc. SPIE 7717, Optical Modelling and Design, 77171H (14 May 2010); doi: 10.1117/12.854420
Show Author Affiliations
Maxim Pisarenco, Eindhoven Univ. of Technology (Netherlands)
Joseph Maubach, Eindhoven Univ. of Technology (Netherlands)
Irwan Setija, ASML Netherlands B.V. (Netherlands)
Robert Mattheij, Eindhoven Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 7717:
Optical Modelling and Design
Frank Wyrowski; John T. Sheridan; Jani Tervo; Youri Meuret, Editor(s)

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