Proceedings Paper
An extended Fourier modal method for plane-wave scattering from finite structures| Format | Member Price | Non-Member Price |
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Paper Abstract
This paper extends the area of application of the Fourier modal method from periodic structures to aperiodic
ones, in particular for plane-wave illumination at arbitrary angles. This is achieved by placing perfectly matched
layers at the lateral sides of the computational domain and reformulating the governing equations in terms of a
contrast field which does not contain the incoming field.
Paper Details
Date Published: 14 May 2010
PDF: 8 pages
Proc. SPIE 7717, Optical Modelling and Design, 77171H (14 May 2010); doi: 10.1117/12.854420
Published in SPIE Proceedings Vol. 7717:
Optical Modelling and Design
Frank Wyrowski; John T. Sheridan; Jani Tervo; Youri Meuret, Editor(s)
PDF: 8 pages
Proc. SPIE 7717, Optical Modelling and Design, 77171H (14 May 2010); doi: 10.1117/12.854420
Show Author Affiliations
Maxim Pisarenco, Eindhoven Univ. of Technology (Netherlands)
Joseph Maubach, Eindhoven Univ. of Technology (Netherlands)
Joseph Maubach, Eindhoven Univ. of Technology (Netherlands)
Irwan Setija, ASML Netherlands B.V. (Netherlands)
Robert Mattheij, Eindhoven Univ. of Technology (Netherlands)
Robert Mattheij, Eindhoven Univ. of Technology (Netherlands)
Published in SPIE Proceedings Vol. 7717:
Optical Modelling and Design
Frank Wyrowski; John T. Sheridan; Jani Tervo; Youri Meuret, Editor(s)
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