Proceedings Paper
CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components| Format | Member Price | Non-Member Price |
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Paper Abstract
A comprehensive characterisation tool for optical component is presented here. Based on both light scattering and
imaging principles, the CCD-ARS set up allows to separate and study localized defects contribution from the local
roughness measurement. The numerical method involved to discriminate intrinsic roughness from the influence of
defects is detailed and some results are given.
Paper Details
Date Published: 14 May 2010
PDF: 11 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180A (14 May 2010);
Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)
PDF: 11 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180A (14 May 2010);
Show Author Affiliations
Myriam Zerrad, Institut Fresnel Marseille, UMR CNRS (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Michel Lequime, Institut Fresnel Marseille, UMR CNRS (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Michel Lequime, Institut Fresnel Marseille, UMR CNRS (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Carole Deumié, Institut Fresnel Marseille, UMR CNRS (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Claude Amra, Institut Fresnel Marseille, UMR CNRS (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Claude Amra, Institut Fresnel Marseille, UMR CNRS (France)
Univ. de Marseille (France)
Domaine Univ. de St Jérôme (France)
Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)
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