A comprehensive characterisation tool for optical component is presented here. Based on both light scattering and imaging principles, the CCD-ARS set up allows to separate and study localized defects contribution from the local roughness measurement. The numerical method involved to discriminate intrinsic roughness from the influence of defects is detailed and some results are given.

Date Published: 14 May 2010
PDF: 11 pages
Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180A (14 May 2010); doi: 10.1117/12.854059

Published in SPIE Proceedings Vol. 7718:
Optical Micro- and Nanometrology III
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)