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Proceedings Paper

Dielectric charging control for electrostatic MEMS switches
Author(s): Manuel Domínguez; David López; David Molinero; Joan Pons-Nin
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Paper Abstract

This work introduces a new control method to dynamically mitigate the effects of the parasitic charge injected in dielectric layers of electrostatic MEMS switches. This method can be used to increase lifetime and reliability of electrostatically actuated MEMS devices. The method is based on the opposite behaviors exhibited by the dielectric charging phenomena when voltage stresses of different polarity are applied to a given device. To this effect, a sigmadelta sensing and actuation scheme has been implemented: device capacitance is periodically sampled and, according to the value obtained, positive or negative actuation voltages are applied. Preliminary experimental results with two different MEMS devices that demonstrate the feasibility of this method are introduced and discussed.

Paper Details

Date Published: 5 May 2010
PDF: 9 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76792J (5 May 2010); doi: 10.1117/12.853177
Show Author Affiliations
Manuel Domínguez, Technical Univ. of Catalonia (Spain)
David López, Technical Univ. of Catalonia (Spain)
David Molinero, Technical Univ. of Catalonia (Spain)
Joan Pons-Nin, Technical Univ. of Catalonia (Spain)

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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