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Proceedings Paper

Pulsed digital oscillators as a tool for the selective activation of MEMS resonant modes
Author(s): Manuel Dominguez-Pumar; Elena Blokhina; Joan Pons-Nin; Orla Feely; Jose Luis Sanchez-Rojas
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Paper Abstract

The purpose of this work is to show that it is possible to excite selectively different resonant modes of a MEMS resonator, by simply changing some parameters in the feedback filter of Pulsed Digital Oscillators (PDOs). Extensive simulation and experimental results are presented showing the goodness of the proposed approach. An iterative map, contemplating more than one resonance, is also obtained from the equation governing the motion of a cantilever.

Paper Details

Date Published: 5 May 2010
PDF: 11 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76792H (5 May 2010); doi: 10.1117/12.853069
Show Author Affiliations
Manuel Dominguez-Pumar, Univ. Politècnica de Catalunya (Spain)
Elena Blokhina, Univ. College Dublin (Ireland)
Joan Pons-Nin, Univ. Politècnica de Catalunya (Spain)
Orla Feely, Univ. College Dublin (Ireland)
Jose Luis Sanchez-Rojas, Univ. de Castilla-La Mancha (Spain)

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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