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Proceedings Paper

Tip-based nanofabrication: an approach to true nanotechnology
Author(s): Adam R. Schofield; Kristen P. Bloschock; Thomas W. Kenny
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Paper Abstract

In order to unlock the true potential of nanotechnology, the development of controlled nanomanufacturing techniques for individual structures is critical. While the capability to grow, deposit, and manipulate nanostructures currently exists, the ability to reliably fabricate these devices with controlled differences in size, shape, and orientation at various substrate positions does not exist. To bridge this gap, the Defense Advanced Research Projects Agency (DARPA) launched the Tip-Based Nanofabrication (TBN) research program with the intent of achieving controlled nanomanufacturing of nanowires, nanotubes and quantum dots using functionalized AFM cantilevers and tips. This work describes the background, goals, and current approaches being explored during the multi-year TBN program.

Paper Details

Date Published: 2 April 2010
PDF: 6 pages
Proc. SPIE 7637, Alternative Lithographic Technologies II, 76371D (2 April 2010); doi: 10.1117/12.852269
Show Author Affiliations
Adam R. Schofield, System Planning Corp. (United States)
Kristen P. Bloschock, System Planning Corp. (United States)
Thomas W. Kenny, Defense Advanced Research Projects Agency (United States)

Published in SPIE Proceedings Vol. 7637:
Alternative Lithographic Technologies II
Daniel J. C. Herr, Editor(s)

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