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Proceedings Paper

On-chip micro-power: three-dimensional structures for micro-batteries and micro-supercapacitors
Author(s): Majid Beidaghi; Chunlei Wang
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Paper Abstract

With the miniaturization of portable electronic devices, there is a demand for micro-power source which can be integrated on the semiconductor chips. Various micro-batteries have been developed in recent years to generate or store the energy that is needed by microsystems. Micro-supercapacitors are also developed recently to couple with microbatteries and energy harvesting microsystems and provide the peak power. Increasing the capacity per footprint area of micro-batteries and micro-supercapacitors is a great challenge. One promising route is the manufacturing of three dimensional (3D) structures for these micro-devices. In this paper, the recent advances in fabrication of 3D structure for micro-batteries and micro-supercapacitors are briefly reviewed.

Paper Details

Date Published: 5 May 2010
PDF: 7 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791G (5 May 2010); doi: 10.1117/12.852254
Show Author Affiliations
Majid Beidaghi, Florida International Univ. (United States)
Chunlei Wang, Florida International Univ. (United States)

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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