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Proceedings Paper

Fabrication of nano- and microstructures by electroforming
Author(s): Praveen K. Dasari; Mehedi Paurazady; Ahalapitiya H. Jayatissa
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Paper Abstract

Nano and micro-structure electrode gaps were fabricated by an electroforming method. Thin film materials were fabricated on an insulator substrate and the microelectrodes with desired shapes were fabricated. Then the electroformation was carried out to produce the gap structure. Controllability of the size of these gaps was investigated by modeling and experimental method. It was found that the nanostructure of wide range of metal, metal oxides and compound semiconductors can be fabricated by this method. In this study, we have attempted formation of Al and Au. Simulation study was carried out based on finite element analysis (FEA) technique. The simulation results were verified with the experimental data.

Paper Details

Date Published: 5 May 2010
PDF: 8 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791Z (5 May 2010);
Show Author Affiliations
Praveen K. Dasari, The Univ. of Toledo (United States)
Mehedi Paurazady, The Univ. of Toledo (United States)
Ahalapitiya H. Jayatissa, The Univ. of Toledo (United States)

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)

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