One-dimensional nanostructures have attracted considerable interest as potential building blocks and functional components in next generation nanoscale sensing, nanoelectromechanical systems (NEMS), circuits, and interconnect applications. The integration and assembly of one-dimensional nanostructures into such device architectures remains a significant challenge. Techniques for site-specific synthesis and self-assembly of one-dimensional nanostructures have proved suitable for a range of integrated nanostructure based-sensing applications yielding robust sensing capabilities realized with a streamlined fabrication process. Specifically, localized heating has emerged as a viable technique for the site specific synthesis of one-dimensional nanostructures. By localizing the heat source, the extent of chemical vapor deposition synthesis reactions can be confined to well-defined, microscale regions. Using the localized synthesis and self-assembly approach, proof-of-concept gas and pressure sensing applications have been demonstrated. The integration and self-assembly approach and sensing applications are described.

Date Published: 5 May 2010
PDF: 15 pages
Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 767919 (5 May 2010); doi: 10.1117/12.849890

Published in SPIE Proceedings Vol. 7679:
Micro- and Nanotechnology Sensors, Systems, and Applications II
Thomas George; M. Saif Islam; Achyut Kumar Dutta, Editor(s)