
Proceedings Paper
Planar silicon SPADs with improved photon detection efficiencyFormat | Member Price | Non-Member Price |
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Paper Abstract
We will report on our advances on the development of a new planar silicon SPAD with high photon detection efficiency
(PDE) and good photon timing resolution. We will show that a 10μm thick epitaxial layer allows for the absorption of a
significant fraction of the incident photons even at the longer wavelengths, while a suitable electric field profile limits
the breakdown voltage value and the timing jitter. Simulations show that the new devices can attain a PDE higher than
30% at a wavelength of 800nm.
Paper Details
Date Published: 28 April 2010
PDF: 12 pages
Proc. SPIE 7681, Advanced Photon Counting Techniques IV, 76810M (28 April 2010); doi: 10.1117/12.849664
Published in SPIE Proceedings Vol. 7681:
Advanced Photon Counting Techniques IV
Mark A. Itzler; Joe C. Campbell, Editor(s)
PDF: 12 pages
Proc. SPIE 7681, Advanced Photon Counting Techniques IV, 76810M (28 April 2010); doi: 10.1117/12.849664
Show Author Affiliations
Angelo Gulinatti, Politecnico di Milano (Italy)
Francesco Panzeri, Politecnico di Milano (Italy)
Ivan Rech, Politecnico di Milano (Italy)
Francesco Panzeri, Politecnico di Milano (Italy)
Ivan Rech, Politecnico di Milano (Italy)
Piera Maccagnani, IMM-CNR sezione di Bologna (Italy)
Massimo Ghioni, Politecnico di Milano (Italy)
Micro-Photon-Devices (Italy)
Sergio D. Cova, Politecnico di Milano (Italy)
Micro-Photon-Devices (Italy)
Massimo Ghioni, Politecnico di Milano (Italy)
Micro-Photon-Devices (Italy)
Sergio D. Cova, Politecnico di Milano (Italy)
Micro-Photon-Devices (Italy)
Published in SPIE Proceedings Vol. 7681:
Advanced Photon Counting Techniques IV
Mark A. Itzler; Joe C. Campbell, Editor(s)
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