We investigated the angular dependence of atomic and ionic debris from CO₂ and YAG laser-produced tin plasmas. Several diagnostic techniques were employed for this study including a Faraday cup, witness plates and subsequent x-ray photoelectron spectroscopic analysis, optical emission spectroscopy etc. It was found that the debris emission from the Nd:YAG laser-produced plasmas fell sharply from the target normal. In contrast, the debris emission from the CO₂ laser-produced plasmas was almost constant at short angles from the target normal. Our results also indicated that the plasma produced by the CO₂ laser emitted less atomic and ionic debris compared to a plasma produced by Nd:YAG laser.

Date Published: 20 March 2010
PDF: 8 pages
Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 763612 (20 March 2010); doi: 10.1117/12.848333

Published in SPIE Proceedings Vol. 7636:
Extreme Ultraviolet (EUV) Lithography
Bruno M. La Fontaine, Editor(s)