Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.

Date Published: 17 February 2010
PDF: 6 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759411 (17 February 2010); doi: 10.1117/12.847793

Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)