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Proceedings Paper

MOPA fiber laser with controlled pulse width and peak power for optimizing micromachining applications
Author(s): Sami T. Hendow; Sami A. Shakir; Joao M. Sousa
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Paper Abstract

An optimized 1064nm MOPA fiber laser configuration is used for generating pulse widths from 10 ns to 250 ns, with pulse repetition frequencies that range from single-shot to 500 kHz, and peak powers up to 10kW. These parameters are independently controlled and used to investigate the effect of peak power and pulse energy on material ablation. Test results are demonstrated for processed silicon and ceramic materials using pulse energies up to 0.5 mJ and peak powers up to 10kW. We demonstrate that pulses with high peak powers have shallow penetration depths, as compared to longer pulses. These experimental results are well correlated with those from a theoretical thermal model for silicon ablation that is based on silicon temperature rise as the incident pulse energy is absorbed.

Paper Details

Date Published: 17 February 2010
PDF: 6 pages
Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 758417 (17 February 2010); doi: 10.1117/12.846928
Show Author Affiliations
Sami T. Hendow, Multiwave Photonics (Portugal)
Sami A. Shakir, Northrop Grumman TASC (United States)
Joao M. Sousa, Multiwave Photonics (Portugal)

Published in SPIE Proceedings Vol. 7584:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
Hiroyuki Niino; Michel Meunier; Bo Gu; Guido Hennig; Jan J. Dubowski, Editor(s)

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