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Proceedings Paper

MEMS devices for laser camera systems for endoscopic applications
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Paper Abstract

In 2007 IPMS and MVIS presented the results of a full colour scanned beam imaging system. In this paper we will in addition give an update on the technological development on die level since the last paper. The already small die size of 3000 μm × 2300 μm was further reduced to less than 2000 μm × 2000 μm. The new devices consist of a moveable frame oscillating at frequencies in the range of 700 Hz - 900 Hz and 1400 Hz - 1800 Hz carrying a mirror of 350 μm diameter in a gimbal mounting. The mirrors oscillate at frequencies in the range of 13-15 kHz. The characteristic mechanical amplitudes are 21° MSA (mechanical scan angle) for the frame and 28° MSA for the mirror respectively. Voltages of less than 50 V for the frame and 100 V for the mirror were necessary to accomplish this. The improved MEMS device design is presented as well as the related measurement results. The images of various objects taken with an optical system using the former devices are presented revealing the excellent resolution of such a system and enabling an outlook on the possibilities of the new device.

Paper Details

Date Published: 16 February 2010
PDF: 14 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759404 (16 February 2010); doi: 10.1117/12.846855
Show Author Affiliations
Christian Drabe, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Richard James, Microvision, Inc. (United States)
Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thilo Sandner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)

Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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