The semiconductor industry has pursued a rapid pace of technology scaling to achieve an exponential component cost reduction. Over the years the goal of technology scaling has been distilled down to two discrete targets. Process engineers focus on sustaining wafer costs, while manufacturing smaller dimensions whereas design engineers work towards creating newer IC designs that can feed the next generation of electronic products. In doing so, the impact of process choices made by manufacturing community on the design of ICs and vice-versa were conveniently ignored. Hoever, with the lack of cost effective lithography solutions at the forefront, the process and design communities are struggling to minimize IC die costs by following the described traditional scaling practices. In this paper we discuss a framework for quantifying the economic impact of design and process decisions on the overall product by comparing the cost-per-good-die. We discuss the intricacies involved in computing the cost-per-good-die as we make design and technology choices. We also discuss the impact of design and lithography choices for the 32nm and 22nm technology node. The results demonstrate a strong volume dependence on the optimum design style and corresponding lithography and strategy. Most importantly, using this framework process and design engineers can collaborate to define design style and lithography solutions that will lead to continued IC cost scaling.

Date Published: 2 April 2010
PDF: 13 pages
Proc. SPIE 7641, Design for Manufacturability through Design-Process Integration IV, 764104 (2 April 2010); doi: 10.1117/12.846556

Published in SPIE Proceedings Vol. 7641:
Design for Manufacturability through Design-Process Integration IV
Michael L. Rieger; Joerg Thiele, Editor(s)