
Proceedings Paper
Hardware implementation of Block GC3 lossless compression algorithm for direct-write lithography systemsFormat | Member Price | Non-Member Price |
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Paper Abstract
Future lithography systems must produce chips with smaller feature sizes, while maintaining throughput comparable to
today's optical lithography systems. This places stringent data handling requirements on the design of any direct-write
maskless system. To achieve the throughput of one wafer layer per minute with a direct-write maskless lithography
system, using 22 nm pixels for 45 nm technology, a data rate of 12 Tb/s is required. In our past research, we have
developed a datapath architecture for direct-write lithography systems, and have shown that lossless compression plays a
key role in reducing throughput requirements of such systems. Our approach integrates a low complexity hardware-based
decoder with the writers, in order to decode a compressed data layer in real time on the fly. In doing so, we have
developed a spectrum of lossless compression algorithms for integrated circuit rasterized layout data to provide a
tradeoff between compression efficiency and hardware complexity, the most promising of which is Block Golomb
Context Copy Coding (Block GC3). In this paper, we present the synthesis results of the Block GC3 decoder for both
FPGA and ASIC implementations. For one Block GC3 decoder, 3233 slice flip-flops and 3086 4-input LUTs are utilized in a Xilinx Virtex II Pro 70 FPGA, which corresponds to 4% of its resources, along with 1.7 KB of internal memory. The system runs at 100 MHz clock rate, with the overall output rate of 495 Mb/s for a single decoder. The corresponding ASIC implementation results in a 0.07 mm2 design with the maximum output rate of 2.47 Gb/s. In addition to the
decoder implementation results, we discuss other hardware implementation issues for the writer system data path,
including on-chip input/output buffering, error propagation control, and input data stream packaging. This hardware data
path implementation is independent of the writer systems or data link types, and can be integrated with arbitrary directwrite
lithography systems.
Paper Details
Date Published: 2 April 2010
PDF: 11 pages
Proc. SPIE 7637, Alternative Lithographic Technologies II, 763716 (2 April 2010); doi: 10.1117/12.846447
Published in SPIE Proceedings Vol. 7637:
Alternative Lithographic Technologies II
Daniel J. C. Herr, Editor(s)
PDF: 11 pages
Proc. SPIE 7637, Alternative Lithographic Technologies II, 763716 (2 April 2010); doi: 10.1117/12.846447
Show Author Affiliations
Hsin-I Liu, Univ. of California, Berkeley (United States)
Brian Richards, Univ. of California, Berkeley (United States)
Brian Richards, Univ. of California, Berkeley (United States)
Avideh Zakhor, Univ. of California, Berkeley (United States)
Borivoje Nikolic, Univ. of California, Berkeley (United States)
Borivoje Nikolic, Univ. of California, Berkeley (United States)
Published in SPIE Proceedings Vol. 7637:
Alternative Lithographic Technologies II
Daniel J. C. Herr, Editor(s)
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