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Proceedings Paper

Surface micro-machined SU-8 2002 membrane mirrors for focus control
Author(s): Sarah J. Lukes; David Lämmle; David L. Dickensheets
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Paper Abstract

We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular electrodes were used for electrostatic actuation. Stable deflection was observed up to 6.8 μm for a 1 mm × 1.4 mm elliptical mirror with an air gap of 14 μm. The frequency response of the membrane exhibited a 3 dB frequency larger than 10 kHz.

Paper Details

Date Published: 16 February 2010
PDF: 6 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940E (16 February 2010); doi: 10.1117/12.844292
Show Author Affiliations
Sarah J. Lukes, Montana State Univ. (United States)
David Lämmle, Albert-Ludwigs-Univ. Freiburg (Germany)
David L. Dickensheets, Montana State Univ. (United States)

Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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