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Proceedings Paper

Dry etched nanoporous silicon substrates for optical biosensors
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Paper Abstract

Porous silicon is an attractive platform for the encapsulation of chemical and biological recognition elements. We demonstrate fabrication of porous silicon using a dry etching technique. The Xenon Difluoride etching technique allows selective formation of porous silicon with a standard photoresist layer as mask. We demonstrate free standing 5μm thick porous silicon films for biological sample filtering. Further, we employ the porous silicon as a substrate for the immobilization of xerogel thin films that encapsulate specific analyte responsive luminophores in their pores. The porous silicon behaves as an optical interference filter which allows selective enhancement of the wavelengths of interest.

Paper Details

Date Published: 12 February 2010
PDF: 6 pages
Proc. SPIE 7574, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VII, 75740Q (12 February 2010); doi: 10.1117/12.843712
Show Author Affiliations
Mohamad Hajj-Hassan, McGill Univ. (Canada)
Maurice Cheung, McGill Univ. (Canada)
Vamsy Chodavarapu, McGill Univ. (Canada)

Published in SPIE Proceedings Vol. 7574:
Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VII
Alexander N. Cartwright; Dan V. Nicolau, Editor(s)

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