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Proceedings Paper

Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications
Author(s): Diaa Khalil; Haitham Omran; Mostafa Medhat; Bassam Saadany
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Paper Abstract

In this work a novel miniaturized Mach-Zehnder MZ interferometer fabricated by Deep Reactive Ion Etching DRIE technology on an SOI wafer is presented. The new structure is based on the use of two Si/Air beam splitters, and two metallic mirrors fabricated monolithically in a small footprint measuring 1 mm × 2 mm on the die. By moving the mirrors using an integrated comb drive actuator, the structure is tested as an FTIR spectrometer and the two wavelengths 1550 nm and 1575 nm have been successfully identified using it. The successful implementation of this 4 elements interferometer in an integrated form opens the door for more complicated optical structures self aligned and fabricated in a one step lithography process

Paper Details

Date Published: 17 February 2010
PDF: 13 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940T (17 February 2010); doi: 10.1117/12.843658
Show Author Affiliations
Diaa Khalil, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Haitham Omran, Ain Shams Univ. (Egypt)
Mostafa Medhat, Si-Ware Systems (Egypt)
Bassam Saadany, Si-Ware Systems (Egypt)

Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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