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Proceedings Paper

SOI based waveguide devices
Author(s): Jinzhong Yu; QingZhong Huang; Xuejun Xu; Xi Xiao; Yu Zhu; Yan Liu; Zhiyong Li; Yuntao Li; Zhongchao Fan; Yude Yu
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Paper Abstract

SOI based waveguide devices are becoming more and more active. The main results of the devices investigated in our team are presented in the paper. Photonic crystal with sharp bends was made and its excess loss is 1.1±0.4dB per mirror. Two kinds of couplers, slot coupler and grating coupler, were successfully fabricated. Coupling loss of the slot coupler is < 3dB between sub-micron optical waveguides and micronscale optical fibers. A coupling efficiency of 40.7% and 3-dB bandwidth of > 40nm of the grating coupler are obtained. Microring and microdisk resonators were simulated and optimized. Their Q factors and extinction ratios are 5.3×104, 14dB, and 2.8×105, 10dB, respectively. SOI PIN diode electro-optical switches with microring, microdisk and MZI were developed. Rise and fall time is 0.37 ns and 2.57 ns, respectively, for a microdisk optical switch.

Paper Details

Date Published: 26 October 2009
PDF: 6 pages
Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160R (26 October 2009); doi: 10.1117/12.843338
Show Author Affiliations
Jinzhong Yu, Institute of Semiconductors (China)
QingZhong Huang, Institute of Semiconductors (China)
Xuejun Xu, Institute of Semiconductors (China)
Xi Xiao, Institute of Semiconductors (China)
Yu Zhu, Institute of Semiconductors (China)
Yan Liu, Institute of Semiconductors (China)
Zhiyong Li, Institute of Semiconductors (China)
Yuntao Li, Institute of Semiconductors (China)
Zhongchao Fan, Institute of Semiconductors (China)
Yude Yu, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 7516:
Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration
Zishen Zhao; Ray T. Chen; Yong Chen; Jinzhong Yu; Junqiang Sun; Weiwei Dong, Editor(s)

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