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Proceedings Paper

Development and testing of a multi-level chevron actuator based positioning system
Author(s): Sandesh Rawool; Ganapathy Sivakumar; Johan Hendriske; Daniel Buscarello; Immanuel Purushothaman; Tim E. Dallas
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Paper Abstract

We present the design, fabrication, and testing of a micro-scale positioning system. The SUMMiT V™ processed design allows an in-plane, bi-directional, micron-scale linear motion of a shuttle using a ratcheting mechanism and multilayered chevron actuators. A single latching system with oppositely faced ratchet teeth on either side of the shuttle is used for achieving the actuation. The design is intended to reduce the footprint and number of electrical connections needed, compared to similar devices. A LabVIEW based optical characterization setup was developed for automated testing of the device. The device produced a maximum displacement of ~180μm.

Paper Details

Date Published: 17 February 2010
PDF: 9 pages
Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920Q (17 February 2010); doi: 10.1117/12.842270
Show Author Affiliations
Sandesh Rawool, Texas Tech Univ. (United States)
Ganapathy Sivakumar, Texas Tech Univ. (United States)
Johan Hendriske, Texas Tech Univ. (United States)
Daniel Buscarello, Texas Tech Univ. (United States)
Immanuel Purushothaman, Arizona State Univ. (United States)
Tim E. Dallas, Texas Tech Univ. (United States)

Published in SPIE Proceedings Vol. 7592:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)

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