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Proceedings Paper

Individually controlled multi-focus laser processing for two-photon polymerization
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Paper Abstract

A parallel processing of two-photon polymerization structuring is demonstrated with spatial light modulator. Spatial light modulator generates multi-focus spots on the sample surface via phase modulation technique controlled by computer generated hologram pattern. Each focus spot can be individually controlled in position and laser intensity with computer generated hologram pattern displayed on spatial light modulator. The multi-focus spots two-photon polymerization achieves the fabrication of asymmetric structure. Moreover, smooth sine curved polymerized line with amplitude of 5 μm and a period of 200 μm was obtained by fast switching of CGH pattern.

Paper Details

Date Published: 17 February 2010
PDF: 6 pages
Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840L (17 February 2010);
Show Author Affiliations
Kotaro Obata, Laser Zentrum Hannover e.V. (Germany)
Jürgen Koch, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 7584:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
Hiroyuki Niino; Michel Meunier; Bo Gu; Guido Hennig; Jan J. Dubowski, Editor(s)

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