
Proceedings Paper
Rotating out-of-plane micromirrorFormat | Member Price | Non-Member Price |
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Paper Abstract
This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The
system consists of polysilicon micromirror which is held at ~45° angle on a gear which has a rotational freedom of
360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the
mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing
procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was
tested for robustness and optical performance. Good correlation was found between experiment and various
simulations.
Paper Details
Date Published: 16 February 2010
PDF: 4 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940H (16 February 2010); doi: 10.1117/12.842003
Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)
PDF: 4 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940H (16 February 2010); doi: 10.1117/12.842003
Show Author Affiliations
Sahil Oak, Texas Tech Univ. (United States)
Greg Edmiston, Texas Tech Univ. (United States)
Ganapathy Sivakumar, Texas Tech Univ. (United States)
Greg Edmiston, Texas Tech Univ. (United States)
Ganapathy Sivakumar, Texas Tech Univ. (United States)
Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)
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