Proceedings Paper
Optimal design of SAW-based gyroscope to improve sensitivity| Format | Member Price | Non-Member Price |
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Paper Abstract
A surface acoustic wave (SAW)-based gyroscope was developed on a piezoelectric substrate. The developed gyroscope
consists of two SAW oscillators, metallic dots, and absorber. Coupling of mode (COM) modeling was conducted to
determine the optimal device parameters prior to fabrication. Depending on the angular velocity, the difference of the
oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg·s at an angular rate range
of 0~1000 deg/s.
Paper Details
Date Published: 4 February 2010
PDF: 10 pages
Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920O (4 February 2010); doi: 10.1117/12.841531
Published in SPIE Proceedings Vol. 7592:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)
PDF: 10 pages
Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920O (4 February 2010); doi: 10.1117/12.841531
Show Author Affiliations
Keekeun Lee, Ajou Univ. (Korea, Republic of)
Published in SPIE Proceedings Vol. 7592:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)
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