Proceedings Paper
Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method| Format | Member Price | Non-Member Price |
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Paper Abstract
In this paper, we presented fabrication of nickel based metal mold with 45° tilted surfaces on both ends of the channel
waveguide through electroplating process. To obtain a precise 45° tilted angle, a 50μm thick SU-8 layer was UV
exposed under de-ionized water, with repeatable error control of 0.5°. The polymeric waveguide array with 45° micromirrors,
which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses
around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.
Paper Details
Date Published: 23 February 2010
PDF: 7 pages
Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070R (23 February 2010);
Published in SPIE Proceedings Vol. 7607:
Optoelectronic Interconnects and Component Integration IX
Alexei L. Glebov; Ray T. Chen, Editor(s)
PDF: 7 pages
Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070R (23 February 2010);
Show Author Affiliations
Xiaolong Wang, Omega Optics, Inc. (United States)
Xinyuan Dou, The Univ. of Texas at Austin (United States)
Xinyuan Dou, The Univ. of Texas at Austin (United States)
Xiaohui Lin, The Univ. of Texas at Austin (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)
Published in SPIE Proceedings Vol. 7607:
Optoelectronic Interconnects and Component Integration IX
Alexei L. Glebov; Ray T. Chen, Editor(s)
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