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Proceedings Paper

Laser direct writing of submicron lines using micro- and nanofiber pens
Author(s): Feng Tian; Guoguang Yang; Jian Bai; Jianfeng Xu; Qiaofen Zhou
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Paper Abstract

In this paper, a novel direct writing technique using micro- and nanofiber pens is presented. The micro- and nanofiber pen serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. The lines with feature sizes down to 100 nm are experimentally achieved by this technique. Experiments also demonstrate that direct writing using micro- and nanofiber pens has some advantages: simple process, large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.

Paper Details

Date Published: 16 February 2010
PDF: 9 pages
Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910M (16 February 2010); doi: 10.1117/12.840603
Show Author Affiliations
Feng Tian, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)
Jian Bai, Zhejiang Univ. (China)
Jianfeng Xu, Zhejiang Univ. (China)
Qiaofen Zhou, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 7591:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
Winston V. Schoenfeld; Jian Jim Wang; Marko Loncar; Thomas J. Suleski, Editor(s)

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