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Proceedings Paper

Design of lath-shaped tool in defective nanostructure removal from digital touch-panel surfaces
Author(s): P. S. Pa
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Paper Abstract

An effective economic viability that uses micro electroremoval as a reclaim system was developed to remove the defective ITO nanostructure coatings from the optical PET surfaces of digital paper. The low yield of ITO thin film deposition is an important factor in semiconductor production. By establishing the reclaim process using the ultra-precise removal of the nanostructure coatings, the optoelectronic semiconductor industry can effectively reclaim defective products, minimizing both production costs and pollution. In the current experiment, a large lath-shaped cathode with a small gap-width between the cathode and the workpiece takes less time for the same amount of ITO removal. A small end radius of the cathode combines with enough electric power to drive fast machining. Pulsed direct current can improve the effect of dreg discharge, and it is advantageous to associate the workpiece with the fast feed rate. However, this improvement can increase the current rating. A high rotational speed of the electrodes, a higher temperature, or a large flow rate of the electrolyte corresponds to a higher removal rate for the ITO nanostructure. The micro electroremoval requires only a short period of time to remove the ITO thin film coatings easily and cleanly.

Paper Details

Date Published: 20 October 2009
PDF: 7 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74934K (20 October 2009); doi: 10.1117/12.840503
Show Author Affiliations
P. S. Pa, National Taipei Univ. of Education (Taiwan)

Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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