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Proceedings Paper

Highly reliable 198-nm light source for semiconductor inspection based on dual fiber lasers
Author(s): Shinichi Imai; Kazuto Matsuki; Nobutaka Kikuiri; Katsuhiko Takayama; Osamu Iwase; Yoshiharu Urata; Tatsuya Shinozaki; Yoshio Wada; Satoshi Wada
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Paper Abstract

Highly reliable DUV light sources are required for semiconductor applications such as a photomask inspection. The mask inspection for the advanced devices requires the UV lightning wavelength beyond 200 nm. By use of dual fiber lasers as fundamental light sources and the multi-wavelength conversion we have constructed a light source of 198nm with more than 100 mW. The first laser is Yb doped fiber laser with the wavelength of 1064 nm; the second is Er doped fiber laser with 1560 nm. To obtain the robustness and to simplify the configuration, the fundamental lights are run in the pulsed operation and all wavelength conversions are made in single-pass scheme. The PRFs of more than 2 MHz are chosen as an alternative of a CW light source; such a high PRF light is equivalent to CW light for inspection cameras. The light source is operated described as follows. Automatic weekly maintenance within an hour is done if it is required; automatic monthly maintenance within 4 hours is done on fixed date per month; manufacturer's maintenance is done every 6 month. Now this 198 nm light sources are equipped in the leading edge photomask inspection machines.

Paper Details

Date Published: 17 February 2010
PDF: 8 pages
Proc. SPIE 7580, Fiber Lasers VII: Technology, Systems, and Applications, 75800H (17 February 2010); doi: 10.1117/12.840467
Show Author Affiliations
Shinichi Imai, Advanced Mask Inspection Technology, Inc. (Japan)
Kazuto Matsuki, Advanced Mask Inspection Technology, Inc. (Japan)
Nobutaka Kikuiri, Advanced Mask Inspection Technology, Inc. (Japan)
Katsuhiko Takayama, NuFlare Technology Inc. (Japan)
Osamu Iwase, NuFlare Technology Inc. (Japan)
Yoshiharu Urata, Megaopto Co., Ltd. (Japan)
Tatsuya Shinozaki, Megaopto Co., Ltd. (Japan)
Yoshio Wada, Megaopto Co., Ltd. (Japan)
Satoshi Wada, Megaopto Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 7580:
Fiber Lasers VII: Technology, Systems, and Applications
Kanishka Tankala, Editor(s)

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