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Proceedings Paper

The micro mechanical environment on the comb capacitive micro-machined gyroscope
Author(s): Hai-peng Liu; Shi-qiao Gao; Shaohua Niu; Lei Jin
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Paper Abstract

With the in-depth researches on MEMS sensors, a lot of mechanical problems are encountered inevitably. Especially for the comb capacitive micro-machined gyroscope, a typical MEMS inertia sensor, the speciality of its structure and micro size determines the characteristics of the mechanical environment. With the reduction of structural size, the ratio of surface force and body force has increased clearly. Comparing with the roles of body force, the roles of surface force in MEMS sensors become more and more important. The micro forces, such as electrostatic force, Van de Waals force, capillary force and air-damping force were analyzed, and the action extent of these micro forces were obtained.

Paper Details

Date Published: 20 October 2009
PDF: 6 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935V (20 October 2009); doi: 10.1117/12.839539
Show Author Affiliations
Hai-peng Liu, Beijing Institute of Technology (China)
Shi-qiao Gao, Beijing Institute of Technology (China)
Shaohua Niu, Beijing Institute of Technology (China)
Lei Jin, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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