Annular binary filters that can fulfill the superresolution are designed and produced. The transverse and axial resolution gains of the filters are defined. The transverse gain is optimized by genetic algorithm to obtain the optimal structure parameters. The designed filter has a transverse gain of 1.37. The distributions of the transverse and axial intensity of the designed filters and the general circular pupil is illustrated, from which we can see that the spot size of the former is reduced by 30% and the depth of focus is increased compared with the latter. The optical system for testing the performances of the binary annular filters was build. The experimental results show the binary annular filter has fulfilled the superresolution.

Date Published: 24 November 2009
PDF: 5 pages
Proc. SPIE 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology, 751311 (24 November 2009); doi: 10.1117/12.837288

Published in SPIE Proceedings Vol. 7513:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology
Toru Yoshizawa; Ping Wei; Jesse Zheng, Editor(s)