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Proceedings Paper

Optimization of scandia thin films for high power laser coating applications
Author(s): Erik M. Krous; Dinesh Patel; Ashot Markosyan; Duy N. Nguyen; Luke A. Emmert; Peter Langston; Roger Route; Martin Fejer; Wolfgang Rudolph; Michelle Shinn; Carmen S. Menoni
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Paper Abstract

We discuss the physical and optical properties of Sc2O3 single layers deposited by the dual ion beam sputtering technique at oxygen partial pressures ranging from 1.7×10-5 to 5.1×10-5 Torr. The films are amorphous with crystallite size ~10 nm and have surface roughness RMS values of 1.2±0.3 nm. The refractive index at 1 μm is 1.95. Absorption loss is shown to be sensitive to the oxygen partial pressure during growth. Multiple-pulse damage experiments suggest that the scandia film deposited at the higher oxygen partial pressure accumulates laser-induced trap defects more slowly than the scandia film deposited in a lower oxygen partial pressure atmosphere.

Paper Details

Date Published: 31 December 2009
PDF: 5 pages
Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 750407 (31 December 2009); doi: 10.1117/12.836915
Show Author Affiliations
Erik M. Krous, Colorado State Univ. (United States)
Dinesh Patel, Colorado State Univ. (United States)
Ashot Markosyan, Stanford Univ. (United States)
Duy N. Nguyen, The Univ. of New Mexico (United States)
Luke A. Emmert, The Univ. of New Mexico (United States)
Peter Langston, Colorado State Univ. (United States)
Roger Route, Stanford Univ. (United States)
Martin Fejer, Stanford Univ. (United States)
Wolfgang Rudolph, The Univ. of New Mexico (United States)
Michelle Shinn, Thomas Jefferson National Accelerator Facility (United States)
Carmen S. Menoni, Colorado State Univ. (United States)

Published in SPIE Proceedings Vol. 7504:
Laser-Induced Damage in Optical Materials: 2009
Gregory J. Exarhos; Vitaly E. Gruzdev; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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