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Proceedings Paper

Structural properties analysis of CdTe thin films deposited by magnetron sputtering
Author(s): Ling-de Kong; Jun Zhao; JIn-cheng Kong; Yan-li Shi; Rong-bin Ji
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Paper Abstract

Different phase structural CdTe films deposited onto 7101 glass substrates by magnetron sputtering were studied as a function of deposition methods at room temperature of 25±1. It was observed that when the deposition power intensity was kept at 0.884w/cm2, and deposition methods were selected among normal method, discrete method and continuous substrate rotation method. Phase structural properties of these films were showed a mix structure of both zinc-blende cubic and wurtzite hexagonal phase, a single structure of cubic phase with the strong (111) preferential orientation, or amorphous CdTe thin films, respectively. Deposition methods played a critical role in determining phase structure of CdTe films.

Paper Details

Date Published: 5 August 2009
PDF: 5 pages
Proc. SPIE 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications, 738347 (5 August 2009); doi: 10.1117/12.835383
Show Author Affiliations
Ling-de Kong, Kunming Institute of Physics (China)
Jun Zhao, Kunming Institute of Physics (China)
JIn-cheng Kong, Kunming Institute of Physics (China)
Yan-li Shi, Kunming Institute of Physics (China)
Rong-bin Ji, Kunming Institute of Physics (China)


Published in SPIE Proceedings Vol. 7383:
International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications
Jeffery Puschell; Hai-mei Gong; Yi Cai; Jin Lu; Jin-dong Fei, Editor(s)

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