Proceedings Paper
Fabrication and emission properties of LaB6 field emission microtriodes| Format | Member Price | Non-Member Price |
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Paper Abstract
Lanthanum hexaboride(LaB6) is a new and exciting field emitter material due to its special properties. In this paper,
LaB6 field emission microtriodes have been fabricated on n-type(100) single crystal silicon substrates by Spindt method.
Such cathodes are produced in closely packed arrays containing 2.7×104 cones that are about 1.0 μm tall in an area of
1mm2. The field emission characteristics are studied in a conventional triode test cell in vacuum system. The turn-on
voltage of LaB6-FEAs is 60V, and the emitters draw about 5.58mA total emission at the gate voltage of 145V.
Furthermore, the Fower-Nordheim plot obtained from the current-voltage characteristic is found to be nearly linear in
accordance with the quantum mechanical tunneling phenomenon.
Paper Details
Date Published: 18 May 2009
PDF: 5 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728411 (18 May 2009); doi: 10.1117/12.832096
Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)
PDF: 5 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728411 (18 May 2009); doi: 10.1117/12.832096
Show Author Affiliations
Xiaoju Wang, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)
Zhulun Lin, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)
Zhulun Lin, Univ. of Electronic Science and Technology of China (China)
Kangcheng Qi, Univ. of Electronic Science and Technology of China (China)
Jiankang Dong, Univ. of Electronic Science and Technology of China (China)
Jiankang Dong, Univ. of Electronic Science and Technology of China (China)
Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)
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