The fabrication and application of micro- and nanoscale containers and devices are recently attracted much attention. The top profiles of these nanoscale patterns are very important for nano-devices integration. The morphologies of small containers, nanopit and nanopore fabricated with focused ion beam (FIB) milling tool, are explored by atomic force microscopy (AFM). The topography of every pattern looks like a volcano. The protruded ring-shaped structures surrounding the crater are attributed to the swelling due to the amorphization when FIB processed the crystal silicon nitride (Si3N4) substrate. In addition, the morphologies of anodic alumina oxide (AAO) membranes fabricated by anodizing of metallic aluminum are discussed.

Date Published: 18 May 2009
PDF: 4 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840U (18 May 2009); doi: 10.1117/12.832089

Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)