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Proceedings Paper

Design and optimization of 2D electrostatic micro scanning mirrors
Author(s): Wenying Ma; Fangrong Hu; Dongmei Cai; Dajia Wang; Chuankai Qiu; Jun Yao
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Paper Abstract

is paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.

Paper Details

Date Published: 18 May 2009
PDF: 5 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840L (18 May 2009); doi: 10.1117/12.832080
Show Author Affiliations
Wenying Ma, Institute of Optics and Electronics (China)
Fangrong Hu, Institute of Optics and Electronics (China)
Dongmei Cai, Institute of Optics and Electronics (China)
Dajia Wang, Institute of Optics and Electronics (China)
Chuankai Qiu, Institute of Optics and Electronics (China)
Jun Yao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)

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