A system-level behavioral model of micro-fuze resonator is accomplished by utilizing integrated design platform for MEMS CAD. Its validity and veracity are verified using both finite element method and theoretical method. The structural parametric design of micro-fuze resonator is finished and the performance parameters are obtained by systemlevel simulation. Results show that system-level method can be applied for the design of other MEMS devices to greatly improve the efficiency, reduce the period and decrease the cost while maintaining a considerable computing accuracy. And the performances of the designed micro-fuze resonator can meet the requirements for common safety system applications.

Date Published: 18 May 2009
PDF: 6 pages
Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840K (18 May 2009); doi: 10.1117/12.832079

Published in SPIE Proceedings Vol. 7284:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Masaomi Kameyama; Xiangang Luo, Editor(s)