An ultra-precision synergistic finishing process integrated MRF and ELID grinding was proposed for shorten total finishing time and improve finishing quality. Sets of ultra-precision experiments were carried out to grind and finish some optical glass BK materials. ELID grinding, as pre-finishing, was employed to obtain high efficiency and high surface quality; and then, MRF, as the final finishing, was employed to improve further surface roughness and form accuracy. BK13 plane glass was processed by integrated ELID grinding using #4000 wheel and MRF. After ELID grinding, λ/5 P-V was obtained, and then, MRF 30 minutes, the form accuracy was improved to λ/28 P-V. Likewise, curvature BK7 glass lens was also used to test. After ELID grinding using #4000 wheel, form accuracy λ/5 P-V and surface roughness 261 nm rms were obtained; and then, MRF 17 minutes (2 cycles), the form accuracy and the surface micro-roughness were improved to λ/18 P-V and 0.56 nm rms. By applying the ultra-precision synergistic finishing process of ELID-grinding and MRF, the glass materials could be finished to sub-nanometer surface micro roughness and ~20 nm figure accuracy in a short time.

Date Published: 20 May 2009
PDF: 4 pages
Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72821X (20 May 2009); doi: 10.1117/12.830891

Published in SPIE Proceedings Vol. 7282:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; John M. Schoen; Yoshiharu Namba; Shengyi Li, Editor(s)