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Proceedings Paper

Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces
Author(s): B. Bodermann; M. Wurm
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Paper Abstract

We investigate some prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures like e. g. parameter sensitivity. Additionally we discuss some limitations with respect to numerical or metrological constrains of different scatterometric methods.

Paper Details

Date Published: 17 June 2009
PDF: 9 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900R (17 June 2009); doi: 10.1117/12.830663
Show Author Affiliations
B. Bodermann, Physikalisch-Technische Bundesanstalt (Germany)
M. Wurm, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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