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Proceedings Paper

Novel technology for polymer-based microbolometers
Author(s): Andreas Nocke; Marcus Wolf; Helmut Budzier; Karl-Friedrich Arndt; Gerald Gerlach
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Paper Abstract

This work investigates the ability to integrate conductive polymer compounds as self-supporting sensitive layers in microbolometers. The polymer matrix is a photoresist that can be structured by UV-lithography and hardened to a highly cross-linked phenolic resin by thermal curing. The electrically conductive filler material is tellurium being synthesized as (nano)rods with an average diameter of 250 nm and an average length of 5 μm. To fabricate microbolometers pixel elements an appropriate technology was developed with the motivation to use cost-efficient polymeric materials and processing steps. It includes a sacrificial layer technique and a dielectrophoretic alignment procedure of the tellurium nanorods. The resulting electrical conducting network in the polymer matrix has a temperature coefficient of resistance (TCR) of -1.4 % / K that yield the bolometric effect. The TCR-value and the resistance are determined by the intrinsic properties of the tellurium nanorods and the characteristics of the hopping conduction occurring between neighboring tellurium nanorods. The electrical properties can be tailored by the alignment procedure to some extent. However, there is an interrelation between a high TCR and a high resistance.

Paper Details

Date Published: 23 September 2009
PDF: 9 pages
Proc. SPIE 7481, Electro-Optical and Infrared Systems: Technology and Applications VI, 74810I (23 September 2009);
Show Author Affiliations
Andreas Nocke, Technische Univ. Dresden (Germany)
Marcus Wolf, Technische Univ. Dresden (Germany)
Helmut Budzier, Technische Univ. Dresden (Germany)
Karl-Friedrich Arndt, Technische Univ. Dresden (Germany)
Gerald Gerlach, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 7481:
Electro-Optical and Infrared Systems: Technology and Applications VI
David A. Huckridge; Reinhard R. Ebert, Editor(s)

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