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Proceedings Paper

Model-based hints for litho-hotspots repair
Author(s): Yue Yang; Marko Chew; Toshikazu Endo; Mark Simmons
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Paper Abstract

A litho hotspot repair hints requires the specifications of how layout edges should be modified. Identifying how layout edges not directly touching the hotspot region is challenging to encode in a rule set. We propose an approach using models called Partition Response Surface Models (pRSM) to estimate the contours changes due to design layout modifications. In this paper we present details of litho hotspot repair hint engine which uses the pRSM models to compute the shape changes amount to resolve a litho hotspot and which can accept constraints from both design considerations or design rule considerations.

Paper Details

Date Published: 23 September 2009
PDF: 9 pages
Proc. SPIE 7488, Photomask Technology 2009, 74883O (23 September 2009); doi: 10.1117/12.829726
Show Author Affiliations
Yue Yang, Mentor Graphics Corp. (United States)
Marko Chew, Mentor Graphics Corp. (United States)
Toshikazu Endo, Mentor Graphics Corp. (United States)
Mark Simmons, Mentor Graphics Corp. (United States)

Published in SPIE Proceedings Vol. 7488:
Photomask Technology 2009
Larry S. Zurbrick; M. Warren Montgomery, Editor(s)

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