In view of low precision of existing semiconductor laser micro displacement real-time interference measuring instrument and the difficulty to adjust, this article proposes a normalized technology and demarcation technology, develops one kind of semiconductor laser vibration real-time interference measuring instrument which has the adjustment function, analyzes its real-time surveys principle and demarcation method. This interferometer carries on processing using normalized electric circuit and real-time phase discriminator to process interference signals, and has realized high accuracy real-time examination of micro displacement. Its measurement result has nothing to do with system parameter luminous intensity, initial light path difference, electric circuit enlargement factor, modulation depth and Bessell function value. Demarcation technology has been carried on to the interferometer, which further increases the measuring accuracy of interferometer. Experimental result confirms the feasibility of this interferometer and its measuring accuracy surpasses 3.89nm.The survey time is smaller than 50μs.

Date Published: 20 May 2009
PDF: 6 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72834C (20 May 2009); doi: 10.1117/12.828822

Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)