The semiconductor laser (LD) Taimangelin interferometer based on sinusoidal phase modulation is vulnerable to external vibration, temperature changes, vibration, and other air interference which causes great measurement error. This paper presents a new semiconductor laser sinusoidal phase modulation shear interference technology and anti-jamming wavelet transform algorithm which is not sensitive to environment interference. It changes the original optical technology in the plane mirror to three pyramid-shear, causing a certain amount of displacement of reference light and object light. and partial use of high resolution wavelet transform algorithm solves the problem in measuring the vibration displacement of measured object..Vibration shear interferometry expression is launched, and theoretically discusses the measurement principle. Using MATLAB before and after the improvement of the methods to simulate contrast obtains the impact of shear volume size on measurement accuracy with experimental test. Experimental results show that it effectively reduces the impact of outside interference on measurement accuracy.

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72834B (20 May 2009); doi: 10.1117/12.828821

Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)