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Proceedings Paper

Mathematical model of contacting aspheric surface profile measurement
Author(s): Gu-feng Qiu
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Paper Abstract

This paper proposes a new mathematical model to simplify the measurement process in high precision contacting aspheric surface profile measurement.This model will unwind the requirement to position adjustment of aspheric mirror while providing high precision measurement results. After a throughout analysis of the possible causes for the measurement mirror of contacting profile measurement instruments, we suggest a new mathematical model based on Least square method to correct the errors caused by the inclination in X, Y direction, eccentricity in X, Y, Z direction that exists in the positioning of aspheric mirror, inaccuracy of curvature radius, and the random micro-excursion between the circumrotating center and the detecting header of profile measurement instrument. By mathematical simulation, it is proved that this model could achieve high precision in correcting those errors stated above. For eccentricity less than 1 cm and inclination less than 0.1 degree, this model could completely correct these errors. It is also very effective in correcting the errors of curvature radius. The results of practical engineering implementation indicate that this model is reliable and effective.

Paper Details

Date Published: 20 May 2009
PDF: 5 pages
Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72832T (20 May 2009); doi: 10.1117/12.828713
Show Author Affiliations
Gu-feng Qiu, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 7283:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; James C. Wyant; Robert A. Smythe; Hexin Wang, Editor(s)

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