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Nanoshaped objects of equal phase volume: scattered far field comparison
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Paper Abstract

Investigation of nanoscale objects is becoming increasingly important with development of modern nanotechnology related industries. Under certain conditions, some information on the investigated object can be obtained in the forward scattering far field when the object is scanned by a focused beam. The sensitivity of the far field based measurements depends on a number of factors including the shape of the investigated object. In this work we present a case study comparing far field response in scanning mode. The response sensitivity for nano-scale phase objects of different shapes and different phase volumes under various illuminating conditions is discussed. We perform a paraxial simulation with investigated phase objects represented as thin optical elements: free standing and as a part of a surface.

Paper Details

Date Published: 17 June 2009
PDF: 10 pages
Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900U (17 June 2009); doi: 10.1117/12.827514
Show Author Affiliations
Alexander Normatov, Technion-Israel Institute of Technology (Israel)
Boris Spektor, Technion-Israel Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 7390:
Modeling Aspects in Optical Metrology II
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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