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Proceedings Paper

Common-path two-wavelength interferometer with submicron precision for profile measurements in online applications
Author(s): José M. Enguita; Ignacio Álvarez; María Frade; Jorge Marina
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Paper Abstract

We propose a common-path two-wavelength intereferometric system based on a single optical element, a Savart Plate, able to obtain profile measurements at frame rate. To improve precision up to the sub-micron levels from safe working distances (beyond 100 mm), we use a speckle reduction system based on a rotating holographic diffuser. The interferometric signals of the two wavelengths are obtained simultaneously and their phase signals are combined to extend the measurement range. The system's common-path interferometry nature, and the possibility of acquiring a distance profile in a single frame, make it ideal for surface inspection in industrial environments.

Paper Details

Date Published: 17 June 2009
PDF: 9 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73890W (17 June 2009); doi: 10.1117/12.827502
Show Author Affiliations
José M. Enguita, Univ. of Oviedo (Spain)
Ignacio Álvarez, Univ. of Oviedo (Spain)
María Frade, Univ. of Oviedo (Spain)
Jorge Marina, DSIPlus (Spain)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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