We introduce a simplified laser Doppler distance sensor comprising only one single fan-shaped interference fringe system for dynamic position and shape measurement of fast moving objects with micrometer precision. Due to its low complexity, it can be built very compact and cheap, which is crucial for many industrial applications. It will be shown theoretically as well as experimentally that its position uncertainty is in principle independent of the object velocity in contrast to conventional distance sensors. In order to evidence its capability, radial and axial shape measurements of rotating bodies are presented employing a miniaturized sensor setup. An average position resolution of 2.3 μm was obtained.

Date Published: 17 June 2009
PDF: 9 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738913 (17 June 2009); doi: 10.1117/12.827500

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)