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Proceedings Paper

Multi-channel liquid crystal cell parameter measurement technique
Author(s): Chih-Shang Liu; Kai-Ping Chuang; Yeo-Sung Lin; Ming-Yin Zhuang; Chih-Jung Chiang
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Paper Abstract

We propose a novel multi-channel liquid crystal cell parameter measurement system, which combines the spectroscopic ellipsometry technique with the hyperspectral imaging spectrograph for the multi-point measurement. This system is based on PSA setup (polarizer-sample-analyzer) to measure normalized transmission spectrum for analyzing properties of homogeneous cell and MVA cell. We also develop a theoretical method to simplify the calculation of the orientation angle of liquid crystal cells for speeding up the measurement. The liquid crystal cell gap can be calculated by the measured retardation and the given refractive indices of specified wavelength. The pretilt angle is also analyzed by multi-channel measurement system. We present the analysis of hyperspectral imaging spectrograph and the orientation angle measurement by direct calculation method for high speed on-line multi-channel liquid crystal cell parameter measurement.

Paper Details

Date Published: 10 September 2009
PDF: 9 pages
Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 743217 (10 September 2009); doi: 10.1117/12.827084
Show Author Affiliations
Chih-Shang Liu, Industrial Technology Research Institute (Taiwan)
Kai-Ping Chuang, Industrial Technology Research Institute (Taiwan)
Yeo-Sung Lin, Industrial Technology Research Institute (Taiwan)
Ming-Yin Zhuang, Industrial Technology Research Institute (Taiwan)
Chih-Jung Chiang, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 7432:
Optical Inspection and Metrology for Non-Optics Industries
Peisen S. Huang; Toru Yoshizawa; Kevin G. Harding, Editor(s)

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